| 摘要 |
A sensor operable at temperatures in excess of 400° C. is described. The sensor of the present invention operates without fluid fill, is non-porous, non-contaminating, and has no exterior exposed metallic components. The sensor includes a non-porous, impermeable sensing diaphragm that may be positioned in direct contact with fluids in an ultra-pure environment. The non-porous surface may be comprised of a layer of single crystal sapphire that is glassed to a backing plate. The sensor of the present invention is suitable for use in a chemically inert pressure transducer module for sensing pressures and/or temperatures in process fluids and may be molded directly into the high temperature plastic housing of the pressure transducer module. |
