发明名称 ORGANOSILOXANE-BASED POLYMER, PHOTOCURABLE RESIN COMPOSITION, METHOD FOR FORMING PATTERN AND FILM FOR PROTECTING SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To produce a photocurable resin composition capable of being exposed by lights having wide wave lengths by using a novel organosiloxane-based polymer. SOLUTION: This organosiloxane-based polymer has a repeating unit expressed by formula (1) [R<1> to R<4> express each a monovalent hydrocarbon group; m expresses 1-2,000 integer; X has a structure expressed by formula (2) (Me denotes methyl); R<5> s express functional organic groups expressed by formula (3) (R' expresses H or methyl; R" expresses a divalent hydrocarbon group) which may be the same or different.
申请公布号 JP2003048988(A) 申请公布日期 2003.02.21
申请号 JP20010237912 申请日期 2001.08.06
申请人 SHIN ETSU CHEM CO LTD 发明人 KATO HIDETO;ASAI SATOSHI;FUJII TOSHIHIKO
分类号 G03F7/075;B05D3/06;C07F7/02;C07F7/08;C07F7/10;C08F230/08;C08G77/04;C08G77/14;C08G77/52;H01L21/027;H01L21/312 主分类号 G03F7/075
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