发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device, with which a wiring structure can be easily prevented from being analyzed by etching a package, a protecting film and an insulating film between metal wirings or the like with a solution. SOLUTION: In the semiconductor device in a multilayer wiring structure provided with a layer insulating film while covering a front face with the protecting film, the protecting film and/or layer insulating film is formed of a material, with which an etching rate is partially enlarged above a wiring layer.
申请公布号 JP2003051537(A) 申请公布日期 2003.02.21
申请号 JP20010237994 申请日期 2001.08.06
申请人 SHARP CORP 发明人 SHIRAI HIDEYUKI
分类号 H01L21/768;H01L21/822;H01L27/04;(IPC1-7):H01L21/768 主分类号 H01L21/768
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