| 摘要 |
PROBLEM TO BE SOLVED: To improve vacuum treatment characteristics, to heighten uniformity of the vacuum treatment characteristics at very high level in particular and to manufacture a non-single crystal film which is excellent and uniform in film thickness, film quality and surface properties. SOLUTION: A cylindrical base body 101 is installed in a pressure reducible reaction vessel 102, a gaseous raw material is introduced in the reaction vessel 102, plasma of the gaseous raw material is generated by supplying high frequency power to a high frequency electrode 104 and decomposed species are deposited to form the non-single crystal film. High frequency power which is obtained by synthesizing at least two high frequency waves of different frequencies in a frequency range between 10 MHz and 250 MHz and two of which having highest power value among high frequency waves of frequency in this frequency range are both above 10% of total power of both, is supplied to the high frequency electrode 104. Further DC voltage or/and AC voltage are applied to the plasma via a bias electrode 114.
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