| 摘要 |
PROBLEM TO BE SOLVED: To provide an air cleaner for clean booth for spreading clean air all over in the whole clean space, even if an air inlet is provided to the side, a method for manufacturing an electro-optic device provided with the air cleaner, electro-optic device, and electronic equipment. SOLUTION: In the air cleaner 600 for the clean booth, there are provided a first partition 630 on the side of an inlet 625 of a filter device 620, and a second partition 640. The first partition 630 partitions the inside of a clean space 610 on this side, and the outside communication part 660 near a floor face 520. The second partition 640 is placed outside of the oppositely place first partition 630. Third partitions 651, 652 are placed on both other sides. The partitions 630, 640, 651, 652 are all formed of electro-conductive plastic sheets. |
