CONNECTION STRUCTURE FOR VACUUM PUMP

摘要

PROBLEM TO BE SOLVED: To provide a connection structure for a vacuum pump that can interrupt transmission of electrical noise generated by a vacuum pump body. SOLUTION: An electrically insulating part 7 for electrically insulating opposite piping ends from each other by means of an electrically insulating material is interposed in connecting piping between a vacuum pump 101 and a vacuum chamber 103 of suction-connected equipment. The electrically insulating part 7 may be arranged on a piping connecting member such as a mechanical vibration absorbing damper 1 (a valve 11 in a connection structure). The periphery of the electrically insulating part 7, if necessary, has a protective cover 9 adapted to the vacuum pump 101.