发明名称 Composition useful for removing resist layers in the manufacture of semiconductor devices comprises an N-hydroxyalkyl alkoxyalkanamide and a swelling agent
摘要 Resist-removing composition comprises an N-hydroxyalkyl alkoxyalkanamide (I) and a swelling agent. An Independent claim is also included for a process for removing a resist layer from a substrate, comprising contacting the substrate with a composition as above.
申请公布号 FR2828746(A1) 申请公布日期 2003.02.21
申请号 FR20020010330 申请日期 2002.08.14
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 PARK DONG JIN;KIM KYUNG DAE;CHON SANG MUN;HWANG JIN HO;SOHN IL HYUN;PARK SANG OH;JUN PIL KWON
分类号 G03F7/32;C11D1/52;C11D7/26;C11D7/32;C11D7/34;C11D7/50;C11D7/60;C11D11/00;G03F7/42;H01L21/027;H01L21/3065 主分类号 G03F7/32
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