SEMICONDUCTOR ELEMENT PROVIDED WITH SELF-ALIGNED METAL CONTACT PLUGS AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor element provided with self-aligned metal contact plugs and a method for manufacturing the element. SOLUTION: A section perpendicular to a semiconductor substrate has a inverted T shape substantially, and an insulating film pattern thicker than a conducting layer pattern is formed on the semiconductor substrate between the conductive layer patterns. On the conductive layer pattern and the insulating film pattern, a nitride film liner is formed in a thickness wherein a trench restricted by the conducting layer pattern and the insulating film pattern is not buried perfectly. The other nitride film is so formed on the nitride film liner that the trench is buried perfectly. At least one metal contact plug in contact with the conducting layer pattern is formed, penetrating the other insulating film and the nitride film liner.