| 摘要 |
PROBLEM TO BE SOLVED: To clean, without damaging fine pattern of an object to be cleaned. SOLUTION: When fine particles (24), blown out of a jet nozzle (20), is made to collide with an object 10 to be cleaned for cleaning, the fine particles is made to collide with a pulverizing plate 40, further, is fined, and is made to collide with the object to be cleaned. |
