| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a processing process managing method and system capable of stabilizing the quality of a product, and improving yield by providing a means for properly varying a processing condition between each process. SOLUTION: This process managing method comprises a management step for judging and managing the validity/invalidity of the pre-process or post- process of this main process according to a control chart having a mean value and upper/lower limit values, a defining process for defining the numerical relational formula of the main process and the pre-process or post-process, a calculating process for calculating a variable mean value and upper/lower limit values for judging the validity/invalidity of the main process from the relation defined by the defining process, a collecting process for collecting the real data of the main process and the pre-process or the main process and the post-process, an evaluating process for evaluating the numerical relational formula of the main process and the pre-process or the post-process, and a setting process for setting the new coefficient of the numerical relational formula when the numerical relation of the main process and the pre-process or the post-process is not established.</p> |
