发明名称 ACCELERATION SENSOR
摘要 PROBLEM TO BE SOLVED: To provide an acceleration sensor having an acceleration detecting band covering a wide range. SOLUTION: This acceleration sensor is constituted by elastically supporting a plurality of movable electrode plates 21, 22, etc., so as to be freely displaced respectively with different sensitivity following the movement of a measured body, and fixing fixed electrode plates 11, 31; 12, 32; etc., into the positions facing the respective movable electrode plates. A signal processing part obtains the acceleration of the measured body by selectively using the capacitance value of a variable capacitor constituted for every pair of movable electrode plate and fixed electrode plate facing each other.
申请公布号 JP2003050250(A) 申请公布日期 2003.02.21
申请号 JP20010240916 申请日期 2001.08.08
申请人 AKASHI CORP 发明人 YOSHIDA YUSAKU
分类号 G01P15/125;H01L29/84;(IPC1-7):G01P15/125 主分类号 G01P15/125
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