| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the peeling of a spray deposit and a stuck film by film deposition from a member for a film deposition apparatus and to particularly prolong the maintenance life of a member on which film deposition and detachment of a medium substrate are repeated, such as a member that fixes and conveys a magnetic disk. SOLUTION: A spray deposit of aluminum or aluminum alloy in which the ratio of the peak intensity of (200) face to that of (111) face by X-ray diffraction becomes <0.4 is formed on the surface of a member for a film deposition apparatus.</p> |
