| 摘要 |
PROBLEM TO BE SOLVED: To automatically calibrate the phase and sensitivity of an eddy current signal even when the phase and amplitude are totally different between a sample signal 21 and an object signal 22. SOLUTION: The correlation (sample correlation) of mutual phase and amplitude of signal elements (1)-(4) of the sample signal 21, and the correlation (object correlation) of the mutual phase and amplitude of elements A-F of the object signal 22 are compared, and the corresponding signal elements of the sample signal 21 and object signal 22 are specified to match the sample signal 21 and object signal 22. Even when the phase and amplitude are totally different between the sample signal 21 and object signal 22, the sample signal 21 and object signal 22 are correctly matched to allow automatic calibration of phase and sensitivity of the eddy current signal.
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