| 摘要 |
PROBLEM TO BE SOLVED: To compactly realize a detector with high natural frequency. SOLUTION: A semiconductor acceleration sensor movable in response to the force caused by the dynamic change of a detecting part, and detecting the dynamic change on the basis of the movement of the movable part whose movable space is closed, is mounted on a substrate 21 rectangular from the top view and stored inside an outer shell body 10 of bottomed cylinder shape. One end of a terminal C is electrically connected to the semiconductor acceleration sensor. The other end of the terminal C is led out to the outside through an insert-through part 13d provided at the outer shell part. In the state of maintaining the watertightness of the insert-through part 13d, a molding agent M is filled in the outer shell part 10. The detected result of the semiconductor acceleration sensor is outputted from the other end of the terminal C led out to the outside. |
