METHOD FOR ABSOLUTE CALIBRATION OF INTERFEROMETER

摘要

PROBLEM TO BE SOLVED: To provide a method for absolute calibration of an interferometer. SOLUTION: In the case of a method for the absolute calibration in an interferometer that has an optical member, that inverts an incidence spherical wave by itself or via a mirror and uses an output spherical wave, at least four measurement procedures measure wavefront aberration W. The optical member is measured at least at two different rotation angle positions inside and outside a focus position, namely at least four measurement positions. Additionally measurement can be made at diaphragm positions (focus 3) via the mirror.