| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyer with which a substrate can be stably conveyed without slip and further draining or drying treatment can be exactly perform in liquid treatment. SOLUTION: When conveying a substrate G by a conveyer 51, the substrate G on a conveying roller 43 is conveyed while pressing both terminals with a pressure roller 36. Thus, slip between both terminals of the substrate G and the conveying roller 43 can be prevented and the delay in conveyance time or generation of particle can be prevented. Further, a supporting roller 37 is provided while having a diameter larger than that of a placing part 43a of the conveying roller 43, and the substrate G is conveyed while being projected upward so that the substrate G can be prevented from being warped. Especially, in the middle of conveyance, trouble like making a treatment liquid such as developer or rinse liquid residual near the center of the substrate G can be eliminated and the drying treatment can be exactly performed. |
