THERMALLY EFFICIENT MICROMACHINED DEVICE

摘要

A micromachined device (1) for efficient thermal processing at least one flu id conducting tube (5) having at least a region with wall thickness of less tha n 50um. The device optionally includes one or more thermally conductive structures in thermal communication with first and second thermally insulati ng protions of the fluid conducting tube (5). The devies also may include a thermally conductive region, and at least a portion of the fluid conducting tube (5) is disposed within the region. A plurality of structures may be provided projecting from a wall of the fluid conducting tube into an inner volume of the tube (5). The structures enhance thermal conduction between a fluid within the tube and a wall of the tube (5). A method for fabricating, from a substrate (3), a micromachined device for processing a fluid stream allows the selective removal of portions of the substrate (3) to provide desired structures integrated within the device. As an example, the micromachined device may be adapted to efficiently react fluid reactants to produce fuel for a fuel cell associated with the device, resulting in a syst em capable of conversion of chemical to electrical.