PROBE CARD CARRIER AND METHOD OF CARRYING PROBE CARD

摘要

A probe card carrier (10), comprising a probe card carrier (10), a body (12) having the probe card carrier (10) installed thereon, and connection mechanisms (13) provided on the body (12) at a plurality of positions facing a probe device (20) and connected to the connected devices (22) of the probe device (20) at four positions, the probe card carriage (10) further comprising a probe card loading mechanism (17) for feeding a probe card (21) in Y−direction and a lifting mechanism (18) for lifting the probe card loading mechanism (17).