STAGE SYSTEM,EXPOSURE DEVICE,AND METHOD OF MANUFACTURING DEVICE

摘要

A stage system, wherein a stage is driven by a stationary part (74) installed so as to be vibrationally isolated from a surface plate (30) and a moving part (72) connected to the stage (RST) along the guide surfaces (92c, 92d) of the surface plate and, when, for example, the vertical drive amount of the surface plate exceeds a specified value, the connection of the stage to the moving part by a connection mechanism (33) is released, whereby, since the connection between the stage and the moving part is released before a large load acts between the moving part and the stationary part by the contact of the moving part connected to the stage on the surface plate with the stationary part, the damage of the moving part and the stationary part by contact can be avoided and, since the stationary part is installed so as to be vibrationally isolated from the surface plate, the positional control of the stage can be performed with high accuracy and, accordingly, the stage can be stably driven over a long period.