| 摘要 |
<p>An optical switch which is easily manufactured and produces little optical loss. A movable electrode plate disposed parallel to a fixed electrode plate with a predetermined space therebetween by a flexible beam-shaped member, at least two mirrors provided on the surface of this movable electrode plate, and at least three V grooves for fixing an optical fiber are simultaneously formed on a single-crystal silicon substrate the surface of which is the (1 0 0) crystal plane by anisotropic etching. Two opposed mirrors are so arranged that mirror surfaces thereof form a right angle, and two parallel V grooves are so formed as to be opposed to each other at an angle of 45° with respect to these mirror surfaces. An output-side optical fiber and an input-side optical fiber are accomodated in and fixed to one V groove and the other V groove, respectively.</p> |
