发明名称 PRESSURE SENSOR
摘要 Pressure gauge preferably arranged to function on the outside of a measuring element (1), the measuring element having a central cavity (103) and being constituted by at least two parts (100A-B) which are tightly joined for creation of the cavity, and comprising sensor organs (11-14) for the mechanical state of stress of the measuring element during pressure influence. The two parts of the measuring element (100A-B) are manufactured in planar techniques, preferably by silicon or quarts with the cavity running in the longitudinal direction. The central cavity has a considerably greater height than width. The sensor organs (11-14) have form of piezo-resistive elements arranged near an outer (105) eventually inner surface of the measuring element.
申请公布号 WO03014690(A1) 申请公布日期 2003.02.20
申请号 WO2002NO00257 申请日期 2002.07.11
申请人 PRESENS AS;SEEBERG, BJOERN, ERIK 发明人 SEEBERG, BJOERN, ERIK
分类号 G01L9/00;(IPC1-7):G01L9/06 主分类号 G01L9/00
代理机构 代理人
主权项
地址