SEAL FOR PROCESS TUBE

摘要

A seal (10A) for sealing and load bearing a process tube (11) in a vacuum system including at least one seal member (50) and at least one load bearing spacer (40) provided in a seal cavity (20) of a housing (17). Seal cavity (20) is configured opposite the process tube (11). Both seal member (50) and load bearing spacer (40) are adapted to contact the process tube (11) when the process tube (11) is mounted to the housing (17).