发明名称 MANIPULATOR FOR A TEST HEAD WITH ACTIVE COMPLIANCE
摘要 A load, such as an electronic test head, is supported. A force sensor detects a force received from the load, the force resulting from the load being imbalanced such that a torque is created about a rotational axis of the load. A source of force provides a counter force relative to the load in response to the force detected by the force sensor. A method of docking an electronic test head held in a test head manipulator to an electronic device handler is also provided. The method of docking includes measuring a magnitude of an imbalance force along or about at least one of a plruality of motion axes of the test head manipulator; and providing a counter force to the imbalance force.
申请公布号 WO0225292(B1) 申请公布日期 2003.02.20
申请号 WO2001US29530 申请日期 2001.09.20
申请人 INTEST IP CORP.;NY, NIL, O.;AKOUKA, HENRI, M.;HOLT, ALYN, R. 发明人 NY, NIL, O.;AKOUKA, HENRI, M.;HOLT, ALYN, R.
分类号 G01M99/00;G01R31/26;G01R31/28;H01L21/66;(IPC1-7):G01R1/073;B23Q1/48 主分类号 G01M99/00
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