APPARATUS FOR PREVENTING DRYING STRIP OF POLISHING PAD CONDITIONER

摘要

PURPOSE: An apparatus for preventing drying a strip of a polishing pad conditioner is provided to improve a degree of cleanness of the strip by injecting deionized water to the strip in a standby state of a conditioner and removing the remaining slurries from a surface of the strip. CONSTITUTION: A deionized water injection portion(100) receives deionized water from a deionized water supply portion(110) and injects the deionized water into a lower side of a strip(62) of a conditioner(60). A control valve(200) is used for switching the supply of the deionized water supplied to the deionized water injection portion(100). A sensor(300) outputs a sense signal when the conditioner(60) is located at a standby position. A control portion(400) receives the sense signal from the sensor(300) and controls the control valve(200). A deionized water control valve(500) is installed between the deionized water injection portion(100) and the control valve(200) in order to control the amount of deionized water supplied to the deionized water injection portion(100).