MICRO-ELECTRO-MECHANICAL MIRROR DEVICES HAVING A HIGH LINEAR MIRROR FILL FACTOR
摘要
An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.
申请公布号
WO03014784(A2)
申请公布日期
2003.02.20
申请号
WO2002US26981
申请日期
2002.08.09
申请人
CORNING INTELLISENSE CORPORATION
发明人
BERNSTEIN, JONATHAN, JAY;CARLEN, EDWIN, THOMAS;MASTRANGELO, CARLOS, HORACIO;TAYLOR, WILLIAM, PATRICK