发明名称 |
PROCEDURE TESTING PARAMETERS OF FILM COATS AND SURFACES IN PROCESS OF THEIR CHANGE AND DEVICE FOR IS IMPLEMENTATION |
摘要 |
FIELD: nondestructive inspection of objects. SUBSTANCE: device incorporates X- ray source and registration system connected to technological system. Registration system shows capability for registration of reflected radiation simultaneously and independently at various angles within solid angle 0-pi/2. Procedure is realized by irradiation of sample with X-ray flux with wave length lambda, at angle theta and by simultaneous registration of reflected X-ray flux. Change of thickness of film coat is observed of oscillation of specular ray. Measuring angular distribution of radiation diffusely scattered by roughness it is possible to determine root-mean-square value sigma of film surface. Density of material can be computed by change of contrast of oscillation of specular ray if change of sigma is known. EFFECT: potential for generation of more objective information on topography of surface of film coat and on density of growing layer right in the run of technological process. 10 cl, 3 dwg
|
申请公布号 |
RU2199110(C2) |
申请公布日期 |
2003.02.20 |
申请号 |
RU19970106825 |
申请日期 |
1997.04.24 |
申请人 |
BARANOV ALEKSANDR MIKHAJLOVICH;KONDRASHOV PAVEL EVGEN'EVICH;SMIRNOV IGOR' SERGEEVICH |
发明人 |
BARANOV A.M.;KONDRASHOV P.E.;SMIRNOV I.S. |
分类号 |
G01N23/20;H01J37/32 |
主分类号 |
G01N23/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|