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发明名称
VERFAHREN ZUR HERSTELLUNG VON SILIZIUM-EINKRISTALLEN
摘要
申请公布号
DE69713231(T2)
申请公布日期
2003.02.20
申请号
DE1997613231T
申请日期
1997.03.25
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
IINO, EIICHI;KIMURA, MASANORI;MURAOKA, SHOZO
分类号
C30B15/00;C30B15/20;C30B15/30;C30B29/06;H01L21/208
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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