| 摘要 |
The present invention relates to a radiation-sensitive resin composition for spacer is a copolymer comprising derivative units, an addition polymerizable monomer having at least one ethylenically unsaturated double bond, radiation-sensitive initiator and solvent, wherein said copolymer comprising (a1) 5 wt %-50 wt % of unsaturated carboxylic acid monomer derivative unit; (a2) 10 wt %-70 wt % of epoxy-containing unsaturated monomer derivative unit; and (a3) 0 wt %-70 wt % of copolymerizable unsaturated monomer derivative unit other than the above monomer derivative units (a1) and (a2). The content of said copolymer [A] which has a molecular weight of 800-7,000 and which has a molecular weight of greater than 70,000 are determined to account for 10 wt %-23 wt % and less than 5 wt %, respectively, based on the total weight of said copolymer[A].
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