| 摘要 |
<p>An imaging method and system are presented for detecting the topography of a sample's surface. Illuminating light is directed to the sample (S) by sequentially passing the illuminating light through a grating (20) and an objective lens arrangement (18). The grating (20) has a pattern formed by spaced-apart transparent regions (Rtr) spaced by non-transparent regions (Rop), and is specifically oriented with respect to the optical axis (OA) of the objective lens arrangement (18). Light, specularly reflected from the sample, is collected by the same objective lens arrangement (18) and is directed to an imaging detector (14) through the same grating (20), thereby enabling creation of an image of the illuminated sample (S) indicative of the topography of the sample's surface.</p> |
