CAPACITIVE DISCHARGE PLASMA ION SOURCE

摘要

In a system (10) for chemical analysis, an RF-driven plasma ionization device (11) including a pair of spaced-apart and plasma-isolated electrodes (14, 16), the electrodes (14, 16) are connected to a power source (22) wherein the electrodes (14, 16) act as plates of a capacitor of a resonant circuit (22c), the gas (S) electrically discharges and creates a plasma of both positive and negative ions, and the voltage is applied as a continuous alternating waveform or as a series of pulses, such as a packet waveform.