发明名称 PLATING DEVICE AND METHOD
摘要 <p>There is provided a plating device that can easily form a uniform plated film on the surface, to be plated, of a material. The plating device includes: a holder for holding a material with its surface, to be plated, upward and its peripheral portion of the surface, to be plated, sealed; a heated fluid holding section for holding a heated fluid which is allowed to come into contact with the back surface of the material held by the holder to heat the material; and a plating solution supply section for supplying a plating solution to the surface, to be plated, of the material held by the holder.</p>
申请公布号 WO2003014416(A2) 申请公布日期 2003.02.20
申请号 JP2002008213 申请日期 2002.08.12
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