发明名称 Flüssigkeitssteurungsgerät
摘要 <p>A connecting member connected to an extension of a massflow controller has attached thereto a gatelike member to hold the connecting member from opposite sides thereof. The gatelike member has a pressing member for pressing the extension against the connecting member from immediately above a seal portion between the extension and the connecting member. <IMAGE></p>
申请公布号 DE69718428(D1) 申请公布日期 2003.02.20
申请号 DE1997618428 申请日期 1997.12.02
申请人 FUJIKIN INC., OSAKA 发明人 NAKAZAWA, MASAHIKO;TSUKADA, KAZUO;YAMAJI, MICHIO;TANAKA, HISASHI
分类号 F17D1/02;G05D7/00;(IPC1-7):G05D16/00;F16K27/00 主分类号 F17D1/02
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