| 摘要 |
Tetrafluoromethane containing ethylene compound, hydrocarbon compounds, carbon monoxide and/or carbon dioxide is contacted with zeolite having an average pore size of 3.4 to 11 Å and an Si/Al ratio of 1.5 or less and/or a carbonaceous adsorbent having an average pore size of 3.4 to 11 Å. Thus, high-purity tetrafluoromethane can be obtained which is advantageous in industry and provides good profitability.
|
