FOUP MOUNTING ROBOT FOR SEMICONDUCTOR EFEM

摘要

A robot integrated with a so−called EFEM unit (12) for supplying wafers carried out from enclosed containers (23, 24, 25) called FOUP to a semiconductor production system (13) or collecting the wafers therefrom to be carried into the containers, comprising a post−like robot body (1) having an elevating/lowering function supported from the upper surface and fixed with a turning arm (2), wherein one or two grip (4, 5) is provided at the forward end of the arm. Supply and collection of the FOUP are carried out simultaneously by providing a function for elevating/lowering the grip and the rotary mechanism thereof independently by employing two grips when the frequency of carriage is high. The robot is characterized by being provided with a function for supplying and collecting the FOUP between the opener section (10) of the EFEM, a storage shelf (7), and carriers (30, 31) on the ceiling face and floor face.