OPTICALLY AND ELECTRICALLY PROGRAMMABLE SILICIDED POLYSILICON FUSE DEVICE

摘要

A silicided polysilicon based fuse device that is programmable by optical and electrical energy in the polysilicon layer without damage to nearby structures, comprising: a Si substrate; an insulating layer disposed on the substrate; and a fuse device section comprising poly-Si/a silicide/ and a barrier layer, the fuse device section forming an electrical discontinuuity in the poly Si layer in response to an electrical pulse or an optical pulse applied to it.