CHEMICAL SUPPLY SYSTEM IN FABRICATION PROCESS OF SEMICONDUCTOR DEVICE

摘要

PURPOSE: A chemical supply system in a fabrication process of a semiconductor device is provided to purge a transferring tube by using gases supplied to a storage tank. CONSTITUTION: A receptacle(110) is used for receiving chemicals(116). A cover(114) is installed on an upper portion of the receptacle(110). A chemical transferring tube(120) is installed at the outside of the receptacle(110) in order to supply the chemicals(116) to a processing apparatus(200). A gas injection tube(130) is installed at ones side of the cover(114) in order to inject helium gas into the inside of the receptacle(110). A purge tube(140) is used for connecting the chemical transferring tube(120) with the gas injection tube(130). A three-wafer valve(150) is installed at a connection portion between the gas injection tube(130) and the purge tube(140). The three-wafer valve(150) is installed at the connection portion between the chemical transferring tube(120) and the purge tube(140).