SUBSTRATE CARRIER, SUBSTRATE PROCESSING SYSTEM AND METHOD FOR CARRYING SUBSTRATE

摘要

PURPOSE: A substrate carrier, a substrate processing system and a substrate carrying method are provided to detect the positional shift of a substrate in the direction orthogonal to the advancing/retracting direction through the simple structure without requiring an extra drive mechanism, and to correct the positional shift of the substrate by using the substrate processing system. CONSTITUTION: When a substrate(G) is taken out from a cassette(C) by pulling a pincette and the pincette is pulled, a sensor(9) located at position(P) before the substrate is taken out is moved to pass one side(Ga) of the substrate while drawing a locus T. Consequently, the position of a held substrate in the direction (Y direction) orthogonal to the advancing/retracting direction of the pincette is calculated from the timing for receiving reflected light when the sensor is moved through one side and the number of rotational pulses of a motor. The positional shift is detected by comparing the timing with the timing when the substrate is held at the normal position of the pincette.