Method for delivering variable amounts of flow, and dosing pumping using this method

摘要

Method for generating a constant volume flow from a storage reservoir into a delivery pipe uses a rotary pump operated at an operating efficiency less than half its maximum operating efficiency. The invention also relates to corresponding use of the method for transport of slurry in a chemical mechanical polishing process or for determination of fluid viscosity. An Independent claim is made for a pump device pages on a rotary pump for delivery of a constant volume flow.