发明名称 |
Optical pellicle adhesion system |
摘要 |
<p>A method of assembling an optical pellicle including a pellicle frame and a pellicle membrane comprising: (a) selecting a pellicle frame corresponding to the shape of the desired pellicle; (b) applying an adhesive containing a first solvent to the pellicle frame; (c) heating the pellicle frame to evaporate the first solvent; (d) fabricating the pellicle membrane; (e) applying a second solvent to the adhesive on the pellicle frame. The second solvent is a mixture of at least two solvents with boiling points which differ by at least 10[deg]C; and (f) mounting the pellicle membrane to the adhesive in the pellicle frame.</p> |
申请公布号 |
EP0858002(B1) |
申请公布日期 |
2003.02.19 |
申请号 |
EP19970309169 |
申请日期 |
1997.11.14 |
申请人 |
MICRO LITHOGRAPHY, INC. |
发明人 |
YEN, YUNG-TSAI;BIH, QOANG RUNG |
分类号 |
C08J5/12;G03F1/64;H01L21/027;(IPC1-7):G03F1/14 |
主分类号 |
C08J5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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