发明名称
摘要 In the disclosure a plasma is confined within a chamber (10) without relying entirely on the chamber walls by introducing a magnetic field across an area or plane through which plasma flow is to be stopped. For example, in order to prevent plasma from leaking or flowing through openings (46,50) necessarily provided the chamber walls, a magnetic field is established at the entrance of the reactor chamber to such an opening, by placing a pair of opposing magnetic poles (60,62; 74,76) across the opening, for example. The magnetic field is sufficiently strong to prevent plasma leaking through the opening. <IMAGE>
申请公布号 KR100362596(B1) 申请公布日期 2003.02.19
申请号 KR19970001567 申请日期 1997.01.21
申请人 发明人
分类号 H01L21/306;H05H1/02;C23F4/00;H01J37/32;H01L21/00;H01L21/205;H01L21/302;H01L21/3065;H05H1/00;H05H1/42 主分类号 H01L21/306
代理机构 代理人
主权项
地址