| 摘要 |
The columns of an aligner are placed on a surface plate. Actuators are provided between the surface plate and leg parts of the column. Acceleration sensors are attached to the surface plate and the leg parts of the column near the leg parts of the column respectively. Relative vibrations in +/-z directions which are generated between the surface plate and the column are detected by the acceleration sensors and, in accordance with the detection results, driving forces generated by the actuators in +/-z directions are controlled. Further, vibration eliminators are attached to the important points of the surface plate, the column or a lower base and vibrations generated locally in the surface plate, the column or the lower base are reduced by the vibration eliminators.
|
