| 发明名称 |
Non-contact mobile charge measurement with leakage band-bending and dipole correction |
| 摘要 |
Corona charges are used to bias a wafer to push down mobile charges and then pull them up during temperature cycles. Mobile charge is measured from the drops in the corona voltage due to the mobile charges. Corrections are made in the measurements for dipole potentials, leakage and silicon band-bending.
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| 申请公布号 |
US6522158(B1) |
申请公布日期 |
2003.02.18 |
| 申请号 |
US19970847644 |
申请日期 |
1997.04.30 |
| 申请人 |
KEITHLEY INSTRUMENTS, INC. |
发明人 |
FUNG MIN-SU;VERKUIL ROGER L.;HORNER GREGORY S.;HOWLAND WILLIAM H. |
| 分类号 |
G01R31/311;(IPC1-7):G01R31/00 |
主分类号 |
G01R31/311 |
| 代理机构 |
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代理人 |
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