Feedback sensor for M.E.M.S. mirrors

摘要

A support for a mirror which reflects a laser ray to a detector. The mirror is gimballed about two perpendicular axes. The mirror is supported solely by strain gauges. Rotation of the mirror about an axis causes one of the strain gauges to produce a signal indicative of the rotation. The signals are used as feedback signals to indicate position of the mirror, and thus position of the reflected ray.