| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow regulation system provided with a seal element capable of precisely forming a small flow while preventing a hysteresis effect. SOLUTION: This flow regulation system 2 has a form wherein an inlet 5, an outlet 6, and adjustable flow regulating means 10; 60 are provided, the flow regulating means 10; 60 have a blocking position 22, and a leak gas flow passing through the system 2 is formed in the blocking position 22. This system 2 further comprises an extraction device 12 for passing the fluid to either one or both of the inlet 4 and the outlet 6, and the extraction device 12 is operable so as to extract the fluid to provide a zero flow at most from the outlet 6 when the flow regulating means 10; 60 occupy the blocking position 22. |
