Focused ion beam machining method and focused ion beam machining apparatus

摘要

When SIM image data D[n] of a mark is compared with reference SIM image data in calculating a displacement of machining position in the nth time, image data D[n-1] just before the nth time is employed as the reference image data and a position displacement of the image is obtained from matching processing of the two kinds of image data of D[n] and D[n-1] to calculate a displacement of machining position.