SURFACE STRIPPING AND CLEANING METHOD USING ULTRA SHORT PULSE LASER AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a surface stripping and cleaning method, by which surface stripping and cleaning requiring fine and careful work is performed precisely for a short time. SOLUTION: The surface stripping and cleaning method is used for stripping and cleaning a unnecessary material stuck on the surface of a material to be cleaned. The unnecessary material is irradiated with ultra short pulse laser to excite the unnecessary material and to cause the drastic increase in shear between the material to be cleaned and the unnecessary material and as a result, the unnecessary material is fragmented and stripped from the surface of the material to be cleaned.