| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-machine manufacturing method not requiring a long time for assembling and joining, even in the micro-machine having three- dimensional structure, and suitable for mass-production. SOLUTION: Recessed parts 12, 14 are formed on a substrate 10 to receive micro-parts 16, 18, the sufficient number of the micro-parts 16, 18 are scattered on the substrate 10, and the micro-parts 16, 18 are put into the recessed parts 12, 14.
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