发明名称 |
Apparatus and method for using a robot to remove a substrate carrier door |
摘要 |
A substrate handling system with integrated door removal assembly for an environmentally controlled substrate processing chamber is provided. The system includes a robot positioned within the chamber. A drive mechanism is connected to the robot. A door interface mechanism is attached to the drive mechanism and includes a door key and a door key control assembly. The drive mechanism provides mechanical control of the door key control assembly such that that door key is manipulated to couple a substrate carrier door to a port door. The coupled doors are storable within the chamber or on the robot. The drive mechanism may also include a substrate end effector, thereby allowing the robot to transport substrates within the chamber. The robot is movable within the chamber to multiple processing stations.
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申请公布号 |
US6520726(B1) |
申请公布日期 |
2003.02.18 |
申请号 |
US20000517377 |
申请日期 |
2000.03.02 |
申请人 |
PRI AUTOMATION, INC. |
发明人 |
COOK GREGORY;CHIDLOW CRAIG;OW RODNEY;NUGYEN LANG VAN;GOMEZ J. RAFAEL;REYLING STEVE;AALUND MARTIN P.;REMIS STEVEN J. |
分类号 |
B65G49/07;H01L21/677;H01L21/687;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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