| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid separation filter less susceptible to moisture less liable to a change in percolation property and excellent in reliability. SOLUTION: A method for manufacturing a fluid separation filter has (a) a step of hydrolyzing a metal alkoxide to prepare a precursor sol, (b) a step of applying and drying the precursor sol on at least one surface of a porous support and carrying out firing to form an oxide film having a plurality of pores formed by cyclic siloxane bonds and silanol groups on the at least one surface of the porous support and (c) a step of exposing the oxide film to steam at 150-500 deg.C. Water can be uniformly adsorbed on the inner walls of numerous pores in the oxide film in advance and the objective fluid separation filter excellent in water resistance and reliability with the lapse of time can be obtained. |
