| 摘要 |
A system for aspirating and ejecting microvolume drops of liquid onto porous sites of a substrate wafer is presented. The system includes a microdispenser employing a piezoelectric transducer attached to a glass capillary, a means for priming and aspirating transfer liquid into the microdispenser, for controlling the pressure of the system liquid, and for washing the microdispenser between liquid transfers, and a pressure sensor to measure the system liquid pressure and produce a corresponding electrical signal. The drops are generally in the 10 to 100 micron range and the pores are generally 10 to 10,000 times smaller than the diameter of the drops deposited thereon. The resulting spots are uniform, and only slightly larger in diameter than that of the drops. The drops are ejected from a distance greater than the diameter of the drops, thus avoiding any contact with the dispenser that could damage the wafer.
|
